TruPlasma RF Air Series 1000

The flexible, robust design of the RF generators allows the throughput to be increased and the operating costs to be reduced.

The patented CombineLine technology with intelligent real time matching guarantees optimum availability of the TruPlasma RF 1001 Air, and reliably prevents plasma fluctuations and impurities.

Due to the compact design (½-19-inch plug-in unit), the RF generator is very space-saving – ideal for new installations and as a retrofit solution in existing systems. It can be integrated very easily due to numerous available interfaces (configurable analogue interface, Ethernet, DeviceNet, PROFIBUS, EtherCAT).

Due to precise energy dosing in increments of 100 mW, top results can be achieved with the TruPlasma RF 1001 Air, even in the most modern and demanding applications, such as atomic layer deposition (ALD). The high-precision power regulation of the RF generator guarantees top wafer-to-wafer repeatability.

Digital control functions, such as smart auto frequency tuning 2.0, arc management and multi-level pulsing allow the RF generator to be optimally adapted to the relevant process.

Different power classes and frequencies are available in the uniform generator design – this means that it is easier to make replacements in the event of process changes. It is also no longer necessary to adjust the cable lengths.

SystemPort enables closed loop control by measuring the RF signal directly at the input and output of the matchbox, meaning that all measured values are always available to the RF generator. The process parameters are continuously monitored, the matchbox is protected, and early arc detection is ensured.