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Plasma treatment

Uncompromisingly pure by using plasma

Plasma technology has further areas of application in industrial production in addition to plasma coating and plasma etching. Workpiece surfaces then require only modification rather than removal or coating. Cleaning:
Workpieces in metal processing previously underwent fine cleaning using CFCs. An alternative for surface cleaning is to use the extremely high reactivity of a gas excited in plasma. Organic residues, for example, can be fully removed using oxygen. Surface activation:
Plasma treatment can chemically modify the inert surface of a workpiece so that color coatings adhere without needing a special primer. This process is particularly practical for the diversity of plastic component designs. Plasma diffusion:
Steel workpiece surfaces often require hardening and corrosion protection. This can be achieved in the plasma simply by nitriding, boriding, or carburizing.

White paper

We have compiled white papers with interesting topics for you

PDF - 715 KB

It depends on the form: bipolar sputtering

Two characteristics of bipolar power supplies are presented in this article: (i) a wide pulse frequency range of up to 100 kHz and (ii) an additional brake time between the positive and negative half-wave of the square wave shape of electricity and voltage.

PDF - 941 KB

Sine or square wave

Since the introduction of dual magnetron sputtering (DMS) for highly insulating layers, it is possible to choose between a square wave pulse and sine wave power supply.

PDF - 567 KB

Auto Frequency Tuning

A countermeasure against rapid fluctuations in the plasma's impedance range is automatic frequency tuning, during which the RF generator sets its fundamental oscillation to a frequency value with better adaptation within a time frame of less than one millisecond.

PDF - 2 MB

New pulsed DC technology

Direct current and pulsed direct current sputtering are some of the most frequently used sputtering techniques in the industrial sector. The introduction of pulsed direct current technology facilitated the mass production of coatings made of non-conductive compounds created by reactive magnetron sputtering.

PDF - 1 MB

Voltage controlled transition mode

Reactive sputtering is a largely successful method used in modern industry to create insulating coatings and hard coatings. In comparison with evaporation, sputtering offers the benefits of the ion-assisted coating, which makes it attractive for the industry despite considerable system and electricity costs.

PDF - 2 MB

Arc management

The creation of arcs during MF magnetron sputtering: A well-known problem during reactive magnetron sputtering is the arc formation at the cathodes.

PDF - 864 KB

LDMOS

This paper explores the effects of performance combining structures on the RF and thermal performance of RF high-power amplifiers under incongruent conditions.

PDF - 425 KB

HiPIMS - new possibilities for the industry

High Power Impulse Magnetron Sputtering (HIPIMS) is the latest PVD process (Physical Vapor Deposition) available to the industry.

PDF - 1 MB

PEALD technology, radio frequency signal generator and matching networks

Atomic Layer Deposition (ALD) is a process during which a number of thin layer materials are deposited from a vapor phase. A very thin film is built up out of atomic layers in several coating cycles.

PDF - 3 MB

Application of pulsed DC sputtering

One of the most interesting resorption materials for solar cells are copper-indium-selenide (CIS) based materials whose properties can be changed by replacing a part of the indium with gallium to make Cu(In,Ga)Se2, known as CIGS.

PDF - 2 MB

Precision in processing

Continuous improvements to the semiconductor production process are required to ensure a continuous reduction in size. This in turn requires TF generators that have an ever-higher signal quality in relation to output power and time resolution.