Robust and powerful solid-state power plasma generator for maximum plasma densities and process requirements
The generators of the TruPlasma MW Series are based on solid-state technology and achieve a significantly higher frequency accuracy than magnetron-based microwave generators. The innovative platform concept can efficiently and economically realize maximum plasma densities and even very demanding process requirements. The modular structure also enables precise scaling of the output power. The power supply remains stable at all times without any impairment to the process quality. The TruPlasma MW Series ensures the best results and maximum reliability in the production of semi-conductors, photovoltaic cells and displays thanks to modern process functions.
Innovative pulsing in the nano second range enables better plasma process control.
Automatic frequency adaptation guarantees an optimum process result and high reproducibility.
Different generators can be operated and pulsed phase-synchronously in multi-antenna systems. By varying the phase coherence between the individual generators, extensive plasma homogeneity can be achieved.
You can rely on the function of the generator – the process quality is not impaired even in the event of a mismatch.
Benefit from highly precise digital frequency modulation which ensures reproducible process results, maximum coating quality and productivity.
You can control the machine very quickly within a millisecond with the digital EtherCat interface. This enables precise plasma distribution.
Production of photovoltaic cells
Plasma processes such as sputtering or plasma-enhanced chemical vapor disposition (PECVD) are used in the area of photovoltaics for material application and ablation. The generators of the TruPlasma MW Series can be adapted to the various processes very quickly and guarantee high productivity as well as first class process results. Thanks to the precise energy dosage, optimum results are achieved even with the most up-to-date and demanding applications. The highly precise power regulation enables top wafer-to-wafer repeatability.
Production of semi-conductors
Plasma generators are used for the most varied plasma processes to manufacture semi-conductors – from dry etching to zone refining in the production of silicon. Our TruPlasma MW Series offers an optimized power supply for all these processes
Coating of flat screen monitors
When coating flat screen monitors, our generators of the TruPlasma MW Series show their strengths in plasma processes such as plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD) and reactive-ion etching (RIE).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price, and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
