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Plasma excitation

TruPlasma MF Series 7000 (G2)

The best in its class

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Complete control over the process

The TruPlasma Series MF 7000 (G2) puts you in control of your process at all times: with their superior arc management and ignition behaviour, the generators are perfect as power supplies for large area coating and demanding reactive processes in dual magnetron sputtering. With peak efficiencies of more than 90%, and particularly efficient cooling water management, the generators are also extremely cost-effective to operate.

Highest coating quality and productivity

Excellent results and high coating rates, even in the most difficult reactive processes.

Maximum efficiency

With peak efficienciesof over 90%, operating efficiencies of over 80% are achieved.

Stable power supply in all ambient conditions

Reliable functioning, even with high cooling water temperatures and low differential pressures.

Can be used worldwide

Variable supply voltage, meaning that no technical adjustment is required.

First-rate MF power supply

Large area coating of architectural glazing: sophisticated materials such as SiOx place high demands on the stability of the power supply.

Application of the thinnest layers

Coating of flat screens and touch panels: dual magnetron sputtering is used to apply ultra-thin (nm), high-strength, and homogeneous AlxOx coatings.

Photovoltaic cell production

Coating of solar glass: the stable power supply of the TruPlasma MF Series 7000 (G2) enables the homogeneous application of ultra-thin transparent conductive coatings (TCO) using MF sputtering.

Maximum cost-effectiveness and flexibility

The high operating efficiencies and the flexible cooling concept of the TruPlasma MF Series 7000 (G2) guarantee maximum cost-effectiveness over the entire service life. Even under difficult ambient and installation conditions, the power supply remains stable at all times – high cooling water temperatures, low water pressures and high humidity levels do not impair the process quality. With its wide operating voltage range, you can use the MF generator worldwide without technical modifications.

Precise process control

With just a few parameter settings, you can precisely control the coating quality and productivity. This helps you achieve an optimal balance between the sensitivity of the ARC treatment and the desired throughput. A variety of interfaces and the convenient TruControl Power operating program also enable effective configuration and diagnostics.

Superior ARC management

High reaction speeds and correspondingly reduced residual energy ensure stable processes and the highest possible sputter rates. Arc formation and thermal stress on the targets is reliably detected and prevented by the generator – the result is absolutely homogeneous coatings across the entire substrate surface. The fast and reliable arc management also enables trouble-free operation of the generator in the voltage-controlled transition range (transition mode).

A comprehensive range of options is available for the TruPlasma MF Series 7000 (G2) to help you adjust your MF generator to meet the requirements of your application.

Active switch cabinet dehumidification

For environments with very high humidity, the generator switch cabinet can be equipped with an active dehumidification unit. Cooling water control is required to operate the unit.

Switch cabinet door

The switch cabinet door is available with a particularly wide opening of 180 degrees as an option (130 degrees is standard).

Equipped for every possibility

Profinet, Profibus, EtherCAT as well as analog and digital interfaces enable the simple integration of the TruPlasma MF Series 7000 into existing systems.

Ultra-fast ARC management

The TruPlasma MF Series 7000 (G2) can be equipped with highly sensitive ARC management (UltraFastTreatment ≤ 1 mJ/kW; ≤ 10 mJ/kW is standard). Safety category 3 is required for UltraFastTreatment.

Auxiliary ignition

This reduces ARC formation and thermal stress. The ignition voltage and ramp time can be individually controlled.

Extended frequency range

The MF generators with power up to 100 kW are available as an option with an extended frequency range of 20 - 70 kHz (20 - 50 kHz is standard).

TruControl Power

The user-friendly, multilingual TruControl Power software offers you versatile options for operation, configuration and diagnostics.

By selecting suitable system components, you can optimally adjust your TruPlasma MF Series 7000 (G2) to your system environment.

MF power cables

You receive optimised TRUMPF Hüttinger MF power cables with your TruPlasma MF Series 7000 (G2). The cables guarantee optimal system performance at all times.

This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.

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Arc management

The creation of arcs during MF magnetron sputtering: A well-known problem during reactive sputtering is arc formation at the cathodes.

PDF - 942 KB

Sine or square wave

Since the introduction of dual magnetron sputtering (DMS) for highly insulating layers, it is possible to choose between a square wave pulse and sine wave power supply.

PDF - 579 KB

Voltage controlled transition mode

Reactive sputtering is a largely successful method used in modern industry to create insulating coatings and hard coatings. In comparison with evaporation, sputtering offers the benefits of ion-assisted coating which makes it attractive for the industry despite considerable system and electricity costs.

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Service & contact

Contact

Ehab Alhawari

Telephone +49 761 89712115

Services

Downloads

TruPlasma MF Series 7000 (G2) brochure

pdf - 3 MB