The latest generation of compact DC generators
The TruPlasma DC Series 3000 (G2) is suitable for a number of DC sputtering processes – including use as a replacement for pulsed process power supplies. This is because progressive arc management offers a guarantee for the best layer qualities and a significantly higher production yield. Because of its extremely compact design you can integrate the water-cooled DC generators very easily into your current application.
Residual energies of < 0.3 mJ/kW guarantee the best layer qualities and high deposition rates.
Very compact design (19-inch plug-in unit) results in simple integration, even for greater power levels.
Output power of 20 kW to 300 kW, so use as a replacement for larger generators is also possible.
Enables long system runtimes and reduces maintenance.
Variable line voltage (400 V to 480 V) and different data interfaces.
Hard material coating
The application of functional coatings using DC magnetron sputtering provides workpieces that undergo a lot of use with increased surface hardness and static friction, as well as better thermal and chemical stability. TruPlasma DC Series 3000 (G2) direct current generators ensure a stable plasma process and therefore optimal coating quality.
Metallisation
A PVD process is used to apply a paper-thin metal layer to various materials in order to provide them with the best possible optical and electrical properties. A power supply that has been optimally adapted to the process parameters enables the deposition of absolutely homogeneous, defect-free layers.
Photovoltaic cell production
In order to influence the electrical properties, photovoltaic cells, as well as flat screens and touchscreens, are coated with electrically conductive materials (TCO). As a result of their very low residual arc energy, TruPlasma DC Series 3000 (G2) direct current generators are ideally suited for this.
Architectural glass
The large area coating of architectural glass in a direct current sputtering process places particularly high demands on the process power supply. TruPlasma DC Series 3000 (G2) direct current generators offer the ideal conditions for high-quality coating results.
Low-cost alternative to pulsed generators
Thanks to their state-of-the-art arc management, TruPlasma DC Series 3000 (G2) direct current generators prove themselves in many sputtering processes. As a low-cost alternative to pulsed DC generators, they also offer a significantly higher production yield.
Compact alternative for higher output
Despite their very compact design, the TruPlasma Series 3000 (G2) direct current generators beat even larger generators in terms of coating quality and productivity. They thus represent a compact and easily integrated alternative, even for a high output power of more than 60 kW.
Water cooling for longer system runtimes
TruPlasma DC Series 3000 (G2) direct current generators have their own complete water cooling system. Compared to air cooled devices, these systems enable a higher system runtime, reduce maintenance costs, and prevent contamination as a result of dust particles.
Various options enable optimal adjustment of the direct current generator to your application.
Water valve control regulates the cooling water flow to avoid condensation and simultaneously protect the generator against overheating.
EtherCAT and EtherNET/IP interfaces enable simple integration of the TruPlasma DC Series 3000 (G2) in existing systems.
Several DC generators in the TruPlasma DC Series 3000 (G2) can be operated simultaneously. This mode enables the synchronisation of the arc recognition of several generators geared toward different targets. The pulse mode can also be synchronised. If high output power is required, a parallel circuit of up to 5 TruPlasma DC 3030 generators is possible. This functions as a TruPlasma DC 3150 unit.
PVD Power
The user-friendly, multilingual PVD Power software offers you numerous operation, configuration and diagnosis options for optimising process quality and effective error correction: display of actual values for all relevant process parameters as well as warnings and alarms, specification of target values by the operator, as well as recording and visualisation of important operating parameters with high temporal resolution (oscilloscope function).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
