Plasma Excitation

The solid-state-based plasma generators in the TruPlasma MW series consist of an innovative platform concept and generate maximum plasma densities for challenging process requirements. The nano-pulses allow a wide range of plasma parameters to be optimized for the desired application.

With their flexible output signals and sophisticated arc management, the process power supplies of the TruPlasma Bipolar Series 4000 (G2.1) produce excellent results when producing solar cells and semi-conductors, when applying decorative and wear-resistant layers and when coating architectural glass. The latest generation of generators are ideally suited for complex plasma processes, such as reactive sputtering, PVD and PECVD.

With the TruPlasma Series MF 7000 (G2) MF generators you always have complete control of your process – resulting in excellent layer qualities and optimum productivity, even for the demanding coating of large areas. With peak efficiencies of over 90%, these power supplies of the latest generation are also extremely cost-effective to operate.

The process power supplies of the TruPlasma Highpulse Series 4000 (G2) produce particularly corrosion-resistant and wear-resistant hard material coatings and are the first choice for HiPIMS applications. In combination with polarised substrates, the TruPlasma Highpulse Series 4000 (G2) can also handle semi-conductor applications, such as trench filling, pre-treatment of surfaces and etching.

The TruPlasma DC Series 4000 (G2) combines the excellent arc handling of TRUMPF Hüttinger with the advantages of DC pulse technology. This means you gain improved coating results with fewer defects, at the same time with a higher deposition rate. The results are brilliant surfaces and a high level of production power.

As a new generation of DC generators, the TruPlasma DC Series 3000 (G2) is suitable for a variety of DC sputtering processes. The DC generators also make an interesting cost-effective alternative to pulsed DC generators due to their progressive arc management and the integrated water cooling. The very compact design also enables simple integration into existing applications.

The TruPlasma Arc Series 3000 generators are particularly impressive for hard material and decorative coatings. With its compact design and air cooling, valuable space is optimised and the unit can be easily integrated into new or existing systems.

The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments of 100 mW – and is thus suitable for diverse plasma applications. Whether manufacturing semi-conductors, solar cells or displays – the patented TRUMPF Hüttinger Technology guarantees top availability and the best process results all around thanks to modern process functions.

The TruPlasma RF Series 1000 / 3000 (G2/13) are the latest generation of RF generators. Thanks to innovative functions such as the patented CombineLine coupling technology or real-time measurement of all process parameters, reliable power supply is guaranteed even in demanding plasma processes – the optimal conditions for reproducible results and high productivity.

The powerful RF generators of the TruPlasma RF Series 3000 are characterised by the highest efficiency and process stability. They are therefore perfectly suited for demanding plasma processes such as the ones used during the production of semi-conductors, photovoltaic cells or flat screens. Matchboxes for impedance matching that are perfectly adapted to the generator ensure the optimal and stable power transfer from the generator to the plasma at all times.

The highest power for your process: the generators of the TruPlasma VHF series 3000 are based on an innovative platform concept which meets even the toughest process demands. The modular design of the VHF generators, which are purely cooled by water, enables the output power to be scaled by up to 80 kW – and this with the smallest footprint!

The exact matching of the output impedance of the RF generator is decisive for an optimal plasma process. This is achieved by the matchboxes of the TruPlasma Match Series 1000 (G2/13) as a link between the generator and the process. This results in a comprehensive solution for your process power supply – the TRUMPF RF system.