Robust and powerful solid-state power generator for maximum plasma densities and process requirements
The TruPlasma MW Series generators use solid-state technology and achieve a significantly higher frequency accuracy than magnetron-based microwave generators. The innovative platform concept can realise maximum plasma densities and even very challenging process requirements efficiently and cost-effectively. The modular design also enables accurate scaling of the output power. The power supply remains stable at all times, without any impairment of the process quality. The TruPlasma MW Series guarantees the best process results and maximum reliability when manufacturing semi-conductors, solar cells and displays.
Innovative pulsing in the nanosecond range enables optimum plasma process control.
Automatic frequency adjustment guarantees optimum process results and high reproducibility.
In multi-antenna systems, various generators can be operated in a phase-synchronized and pulsed manner. Extensive plasma homogeneity can be achieved by varying the phase coherence between the individual generators.
You can rely on the function of the generator – the process quality is not impaired even in the event of a mismatch.
Benefit from ultra-precise digital frequency modulation which ensures reproducible process results, maximum coating quality and productivity.
The EtherCat digital interface allows you to control the device very quickly within a millisecond. This enables precise plasma distribution.
Production of photovoltaic cells
Plasma processes such as sputtering or plasma-enhanced chemical vapour disposition (PECVD) are used in the area of photovoltaics for material application and ablation. The generators of the TruPlasma MW Series can be adapted to the various processes very quickly and guarantee high productivity as well as first class process results. Thanks to the precise energy dosage, optimum results are achieved even with the most up-to-date and demanding applications. The highly precise power regulation enables top wafer-to-wafer repeatability.
Production of semi-conductors
Plasma generators are used for the most varied plasma processes to manufacture semi-conductors – from dry etching to zone refining in the production of silicon. Our TruPlasma MW Series offers an optimised power supply for all these processes
Coating of flat screen monitors
When coating flat screen monitors, our generators of the TruPlasma MW Series show their strengths in plasma processes such as plasma-enhanced chemical vapour deposition (PECVD), atomic layer deposition (ALD) and reactive-ion etching (RIE).
This product range and information may vary depending on the country. Subject to changes to technology, equipment, price and range of accessories. Please get in touch with your local contact person to find out whether the product is available in your country.
